We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~ 20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.

A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides / Pettinari, Giorgio; Gerardino, A.; Businaro, L.; Polimeni, Antonio; Capizzi, Mario; Hopkinson, M.; Rubini, S.; Biccari, Francesco; Intonti, F.; Vinattieri, Anna; Gurioli, Massimo; Felici, Marco. - In: MICROELECTRONIC ENGINEERING. - ISSN 0167-9317. - 174:(2017), pp. 16-19. [10.1016/j.mee.2016.12.003]

A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides

PETTINARI, GIORGIO;POLIMENI, Antonio;CAPIZZI, Mario;BICCARI, FRANCESCO;VINATTIERI, Anna;GURIOLI, MASSIMO;FELICI, Marco
2017

Abstract

We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~ 20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.
2017
Dilute nitrides; Hydrogen in semiconductors; Photonic crystal structures; Site-controlled QDs; Electronic, Optical and Magnetic Materials; Atomic and Molecular Physics, and Optics; Condensed Matter Physics; Surfaces, Coatings and Films; Electrical and Electronic Engineering
01 Pubblicazione su rivista::01a Articolo in rivista
A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides / Pettinari, Giorgio; Gerardino, A.; Businaro, L.; Polimeni, Antonio; Capizzi, Mario; Hopkinson, M.; Rubini, S.; Biccari, Francesco; Intonti, F.; Vinattieri, Anna; Gurioli, Massimo; Felici, Marco. - In: MICROELECTRONIC ENGINEERING. - ISSN 0167-9317. - 174:(2017), pp. 16-19. [10.1016/j.mee.2016.12.003]
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11573/954683
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