Surface Acoustic Waves in Thin Films Nanometrology

Thin films nanometrology is an emerging field in nanoscience as the synthesis, processing and applications of nanostructured thin films require an in-depth knowledge of their elastic constants. The elastic energy of a surface acoustic wave propagating in a solid medium, is concentrated at the interface between the solid and air (or a sufficiently rarified medium); consequently, high frequency surface acoustic waves with sub-micrometer wavelengths are an extraordinary tool for a qualitative and quantitative elastic characterization of thin films. In this article, a short review is presented to describe the main ultrasound techniques based on surface acoustic waves for thin films characterization and to highlight the probing limits of acoustic nanometrology.