Simulation and construction of a mems CSFH based microgripper

This paper describes the design, simulation, construction process and experimental analysis of a microgripper, which makes use of a new concept hinge, called CSFH (Conjugate Surfaces Flexure Hinge). The new hinge combines a curved cantilever beam, as flexible element, and a pair of conjugate surfaces, whose contacts depend on load conditions. CSFHs improve accuracy and guarantee that minimum stress conditions hold within the flexible beam. This microgripper is designed for Deep Reactive-Ion Etching (DRIE) construction process and comb-drive actuation. Theoretical basis and Finite Element Analysis (FEA) simulations have been employed in order to predict the feasibility of the device under construction. Finally, some experimental evidence of the construction process has been provided.