This paper describes a novel and easily manufacturable method for increasing the thermal resistance of microheaters fabricated on glass substrates, thus decreasing the thermal dissipation of the devices. An automatic sawing machine was exploited to dig 240 μm wide trenches in order to thermally isolate the heater from the glass substrate and four different layouts of the trenches have been investigated. An improvement of the thermal resistance up to 217% on a heat sink and 30% in air has been obtained. The thermal capacitance was also considerably decreased, thus improving the dynamic thermal behavior.

Improvement of the Thermal Resistance of Thin Film Heaters on Glass Substrate for Lab-on-Chip Applications / A., Scorzoni; M., Tavernelli; P., Placidi; P., Valigi; S., Zampolli; Caputo, Domenico; Petrucci, Giulia; Nascetti, Augusto. - STAMPA. - 87:(2014), pp. 959-962. (Intervento presentato al convegno Eurosensors tenutosi a Brescia, Italy nel 7-10 September 2014) [10.1016/j.proeng.2014.11.316].

Improvement of the Thermal Resistance of Thin Film Heaters on Glass Substrate for Lab-on-Chip Applications

CAPUTO, Domenico;PETRUCCI, GIULIA;NASCETTI, Augusto
2014

Abstract

This paper describes a novel and easily manufacturable method for increasing the thermal resistance of microheaters fabricated on glass substrates, thus decreasing the thermal dissipation of the devices. An automatic sawing machine was exploited to dig 240 μm wide trenches in order to thermally isolate the heater from the glass substrate and four different layouts of the trenches have been investigated. An improvement of the thermal resistance up to 217% on a heat sink and 30% in air has been obtained. The thermal capacitance was also considerably decreased, thus improving the dynamic thermal behavior.
2014
Eurosensors
Lab-On-Chip, Thin film heater on glass, glass microfabrication, microheater, thermal resistance, thermal capacitance, thermal time constant.
04 Pubblicazione in atti di convegno::04b Atto di convegno in volume
Improvement of the Thermal Resistance of Thin Film Heaters on Glass Substrate for Lab-on-Chip Applications / A., Scorzoni; M., Tavernelli; P., Placidi; P., Valigi; S., Zampolli; Caputo, Domenico; Petrucci, Giulia; Nascetti, Augusto. - STAMPA. - 87:(2014), pp. 959-962. (Intervento presentato al convegno Eurosensors tenutosi a Brescia, Italy nel 7-10 September 2014) [10.1016/j.proeng.2014.11.316].
File allegati a questo prodotto
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11573/763763
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 3
  • ???jsp.display-item.citation.isi??? 3
social impact