A series of diamond films has been deposited from methane/hydrogen mixtures by hot filament CVD (Chemical Vapour Deposition) on polycrystalline Ti sheets previously coated by amorphous carbon layers and on glassy carbon plates irradiated by a pulsed ruby laser (lambda=6943 Angstrom, 300 and 500 mJ/cm(2)). Structural investigation of the pre-treated substrate surfaces and of the topmost deposits has been performed by means of-Reflection High Energy Electron Diffraction (RHEED) and Electron Energy Loss Spectroscopy (EELS).
Morphological and structural investigations of Diamond films deposited on substrates covered by carbon layers / M. L., Terranova; Rossi, Marco; V. SESSA AND G., Vitali. - STAMPA. - 203:(1996), pp. 291-296. (Intervento presentato al convegno Scientific Meeting of the Italian-Association-of-Crystallography tenutosi a Brindisi nel MAR 15-19, 1995) [10.4028/www.scientific.net/MSF.203.291].
Morphological and structural investigations of Diamond films deposited on substrates covered by carbon layers
ROSSI, MarcoInvestigation
;
1996
Abstract
A series of diamond films has been deposited from methane/hydrogen mixtures by hot filament CVD (Chemical Vapour Deposition) on polycrystalline Ti sheets previously coated by amorphous carbon layers and on glassy carbon plates irradiated by a pulsed ruby laser (lambda=6943 Angstrom, 300 and 500 mJ/cm(2)). Structural investigation of the pre-treated substrate surfaces and of the topmost deposits has been performed by means of-Reflection High Energy Electron Diffraction (RHEED) and Electron Energy Loss Spectroscopy (EELS).I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
