In this work we report on hydrothermal growth of ZnO nanostructures obtained by using strip-shaped resist templates made by electron beam lithography, with particular focus on: (i) the effects of materials used and processing on the template adhesion and its stability during wet growth; (ii) the influence of the template pattern dimensions on the nanowires morphology. Templates made of patterned films with methylmethacrylate–methacrylic acid copolymer showed greater adhesion and stability with respect to the commonly used poly (methylmethacrylate) electron resist or to the use of thin adhesion-promoter photoresist layers. The growth of nanowires in strip-shaped methyl methacrylate–methacrylic acid copolymer templates has been investigated using typical hydrothermal growth parameters and a marked dependence of nanowires length and diameter has been found on the template size for strips narrower than about 2 μm.
ZnO nanowires strips growth: template reliability and morphology study / M., Pea; L., Maiolo; R., Pilloton; A., Rinaldi; Araneo, Rodolfo; E., Giovine; A., Orsini; A., Notargiacomo. - In: MICROELECTRONIC ENGINEERING. - ISSN 0167-9317. - 121:(2014), pp. 147-152. [10.1016/j.mee.2014.04.045]
ZnO nanowires strips growth: template reliability and morphology study
ARANEO, Rodolfo;
2014
Abstract
In this work we report on hydrothermal growth of ZnO nanostructures obtained by using strip-shaped resist templates made by electron beam lithography, with particular focus on: (i) the effects of materials used and processing on the template adhesion and its stability during wet growth; (ii) the influence of the template pattern dimensions on the nanowires morphology. Templates made of patterned films with methylmethacrylate–methacrylic acid copolymer showed greater adhesion and stability with respect to the commonly used poly (methylmethacrylate) electron resist or to the use of thin adhesion-promoter photoresist layers. The growth of nanowires in strip-shaped methyl methacrylate–methacrylic acid copolymer templates has been investigated using typical hydrothermal growth parameters and a marked dependence of nanowires length and diameter has been found on the template size for strips narrower than about 2 μm.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
