PDMS (Polydimethylsiloxane) polymer is a suitable material for biological and MEMS (Microelectromechanical systems) designers, because of its biocompatibility, transparency and high resistance under plasma treatment. PDMS round channel is always been of great interest due to its ability to confine the liquid with membrane type micro valves. In this paper we are presenting a very simple way to form round shapemicrofluidic channel, which is based on reflow of positive photoresist AZ® 40 XT. With this method, it is possible to obtain channel of different height simply by varying the spin coating parameters of photoresist
Formation of round channel for microfluidic application / A., Zahra; DE CESARE, Giampiero; Caputo, Domenico; Nascetti, Augusto. - In: INTERNATIONAL JOURNAL OF ELECTRONICS, ELECTRICAL AND COMMUNICATION ENGINEERING. - ISSN 0975-4814. - 8:7(2014), pp. 945-949.
Formation of round channel for microfluidic application
DE CESARE, Giampiero;CAPUTO, Domenico;NASCETTI, Augusto
2014
Abstract
PDMS (Polydimethylsiloxane) polymer is a suitable material for biological and MEMS (Microelectromechanical systems) designers, because of its biocompatibility, transparency and high resistance under plasma treatment. PDMS round channel is always been of great interest due to its ability to confine the liquid with membrane type micro valves. In this paper we are presenting a very simple way to form round shapemicrofluidic channel, which is based on reflow of positive photoresist AZ® 40 XT. With this method, it is possible to obtain channel of different height simply by varying the spin coating parameters of photoresistI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
