A novel topology for a micromachined acoustic speaker suitable for cellular phones is proposed in this paper. The membrane is composed of two materials, each of them with different function: a silicon moving part acting as a rigid piston, and polymer annulus acting only as suspension. The high ratio between Young moduli and masses of membrane and suspension leads to a simpler design of the mass-spring-damper system. This new topology can be obtained thanks to a new micromachining technology, that leads to an higher adhesion between polymer and silicon. Simulations presenting the main micro-loudspeaker parameters (e.g. SPL, frequency response) are presented in details as also the principal technological steps. © 2011 IEEE.
A novel micromachined loudspeaker topology / F., Neri; F., Di Fazio; R., Crescenzi; Balucani, Marco. - (2011), pp. 1221-1227. (Intervento presentato al convegno 2011 61st Electronic Components and Technology Conference, ECTC 2011 tenutosi a Lake Buena Vista; United States nel 31 May 2011 through 3 June 2011) [10.1109/ectc.2011.5898666].
A novel micromachined loudspeaker topology
BALUCANI, Marco
2011
Abstract
A novel topology for a micromachined acoustic speaker suitable for cellular phones is proposed in this paper. The membrane is composed of two materials, each of them with different function: a silicon moving part acting as a rigid piston, and polymer annulus acting only as suspension. The high ratio between Young moduli and masses of membrane and suspension leads to a simpler design of the mass-spring-damper system. This new topology can be obtained thanks to a new micromachining technology, that leads to an higher adhesion between polymer and silicon. Simulations presenting the main micro-loudspeaker parameters (e.g. SPL, frequency response) are presented in details as also the principal technological steps. © 2011 IEEE.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
