Local indentation modulus characterization of diamond-like carbon films by atomic force acoustic microscopy two contact resonance frequencies imaging technique

Two contact resonance frequencies atomic force acoustic microscopy imaging technique has been used to evaluate local indentation modulus of a diamondlike carbon film deposited on a molybdenum foil by laser ablation from glassy carbon target. Acoustic images were obtained by measuring both first and second contact resonance frequency at each point of the scanned area, and then numerically evaluating local contact stiffness and reconstructing an indentation modulus bidimensional pattern. The wide difference of the indentation modulus values allows to detect the presence of residual glassy carbon agglomerates in the diamondlike carbon film.