Atomic force acoustic microscopy is a dynamical AFM-based technique developed for non-destructive characterization of elastic properties of materials at micrometrical and sub-micrometrical scale. A standard AFM apparatus is equipped with a piezoelectric transducer exciting longitudinal oscillations at ultrasonic frequencies in the sample under investigation. Tip-sample contact stiffness is obtained through the values of the measured resonance frequencies of the cantilever contacting the sample surface, thus allowing one to obtain the value of the sample indentation modulus. The paper describes a generalization of the technique: while performing topography, the first and the second contact resonance frequencies are acquired at each point of the scanned area. Data are then properly processed and acoustic images are obtained as a bi-dimensional pattern of the indentation modulus over the imaged samples area. The technique is illustrated in two different kinds of sample: a metallographic (110) GaAs sample, prepared by incorporating GaAs single crystals into an epoxy matrix, and a diamond-like carbon film, deposited on a Mo substrate by laser ablation from a glassy carbon target. (c) 2006 Elsevier B.V. All rights reserved.

Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopy / Passeri, Daniele; Bettucci, Andrea; Germano, Massimo; Rossi, Marco; Alippi, Adriano; A., Fiori; E., Tamburri; S., Orlanducci; M. L., Terranova; J. J., Vlassak. - In: MICROELECTRONIC ENGINEERING. - ISSN 0167-9317. - 84:3(2007), pp. 490-494. (Intervento presentato al convegno Symposium on Nanoscale Imaging and Metrology of Devices and Innovative Materials held at the 2006 EMRS Spring Meeting tenutosi a Nice, FRANCE nel MAY 29-JUN 02, 2006) [10.1016/j.mee.2006.10.069].

Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopy

PASSERI, Daniele;BETTUCCI, Andrea;GERMANO, Massimo;ROSSI, Marco;ALIPPI, Adriano;
2007

Abstract

Atomic force acoustic microscopy is a dynamical AFM-based technique developed for non-destructive characterization of elastic properties of materials at micrometrical and sub-micrometrical scale. A standard AFM apparatus is equipped with a piezoelectric transducer exciting longitudinal oscillations at ultrasonic frequencies in the sample under investigation. Tip-sample contact stiffness is obtained through the values of the measured resonance frequencies of the cantilever contacting the sample surface, thus allowing one to obtain the value of the sample indentation modulus. The paper describes a generalization of the technique: while performing topography, the first and the second contact resonance frequencies are acquired at each point of the scanned area. Data are then properly processed and acoustic images are obtained as a bi-dimensional pattern of the indentation modulus over the imaged samples area. The technique is illustrated in two different kinds of sample: a metallographic (110) GaAs sample, prepared by incorporating GaAs single crystals into an epoxy matrix, and a diamond-like carbon film, deposited on a Mo substrate by laser ablation from a glassy carbon target. (c) 2006 Elsevier B.V. All rights reserved.
2007
atomic force acoustic microscopy; elastic properties imaging; indentation modulus measurement
01 Pubblicazione su rivista::01a Articolo in rivista
Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopy / Passeri, Daniele; Bettucci, Andrea; Germano, Massimo; Rossi, Marco; Alippi, Adriano; A., Fiori; E., Tamburri; S., Orlanducci; M. L., Terranova; J. J., Vlassak. - In: MICROELECTRONIC ENGINEERING. - ISSN 0167-9317. - 84:3(2007), pp. 490-494. (Intervento presentato al convegno Symposium on Nanoscale Imaging and Metrology of Devices and Innovative Materials held at the 2006 EMRS Spring Meeting tenutosi a Nice, FRANCE nel MAY 29-JUN 02, 2006) [10.1016/j.mee.2006.10.069].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11573/363318
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