Performance evaluation of a MEMS-based pseudo-parallel micromanipulator

This work presents a MEMS microgripping device integrated with cooperating actuators in a pseudo-parallel configuration. Pseudoparallel rotary comb drives, arranged in a floating-centered layout, are proposed as a route to enhanced force exertion in micromanipulation applications. The concept is demonstrated through a modular multi-link device compatible with standard Silicon-on-Insulator MEMS processes. A prototype was fabricated and tested, accompanied by numerical simulations on a digital twin. Results show that pseudo-parallel modules increased force exertion at the tip by up to 30.5% relative to non-parallel configurations, while preserving the four-bar kinematics.