Highly efficient voltage-controlled MOEMS microring resonator

Photonic integrated circuits (PICs) are increasingly evolving through the integration of compact, energy-efficient, and reconfigurable components for advanced optical applications. In this work, we present a voltage-controlled add-drop microring resonator implemented on a Silicon-on-Insulator (SOI) platform. The proposed device exploits in-plane mechanical deformation induced by electrostatic rotary combdrive actuators to achieve efficient wavelength tuning. Multiphysics simulations demonstrate resonance shifts of 6.81 nm and 11.66 nm for actuation voltages of 1 V and 2 V, respectively. This corresponds to a sensitivity of 5.83 nm/V, significantly exceeding that of previously reported voltage-controlled microring devices. The achieved large tuning range at low voltage highlights the potential of the proposed MOEMS architecture for low-power, highly scalable, and programmable photonic systems.