FIB-SEM Tomography: Fundamentals and Applications in Materials Sciences

Focused ion beam (FIB)-scanning electron microscopy (SEM) tomography is an extremely important and reliable technique for the three-dimensional reconstruction of microscopic structures with nanometric resolution, with great potential to be integrated with other analytical techniques. FIB-SEM tomography plays a crucial role in the development of innovative multiscale and multimodal correlative microscopy workflows because it can be seamlessly integrated with other imaging modalities, as the reconstruction range bridges the gap between the non-destructive X-ray families of tomographic techniques, which provide sub-micron resolution, and the nano- to atomic-scale resolution achieved by transmission electron microscopy (TEM) tomography.