This paper presents the design, fabrication, and characterization of a thin-film Cr-Al-Cr (300 A°-1500 A°-300 A°) metal stack heater specially designed for chemical reactions which occur at a uniform temperature in the lab on a chip platform such as polymerase chain reaction (PCR) applications. The heater has been designed using COMSOL Multiphysics. The simulated design has been fabricated using lithography and patterning on a 5 × 5 cm2 glass substrate. For the validation of the proposed design thermal study of the fabricated heater has also been done using a FLIR IR camera. A very good agreement between the thermal image of modeled and fabricated heater has been achieved. This demonstrates the suitability of the proposed heater for PCR reaction applications.
Thermal study of thin-film heater for PCR reaction-based applications / Zahra, A.; de Cesare, G.; Caputo, D.; Abbas, Z.. - 126:(2023), pp. 266-274. (Intervento presentato al convegno 6th Conference on Microactuators, Microsensors and Micromechanisms, MAMM 2022 tenutosi a Hyderabad; India) [10.1007/978-3-031-20353-4_21].
Thermal study of thin-film heater for PCR reaction-based applications
de Cesare G.;Caputo D.;
2023
Abstract
This paper presents the design, fabrication, and characterization of a thin-film Cr-Al-Cr (300 A°-1500 A°-300 A°) metal stack heater specially designed for chemical reactions which occur at a uniform temperature in the lab on a chip platform such as polymerase chain reaction (PCR) applications. The heater has been designed using COMSOL Multiphysics. The simulated design has been fabricated using lithography and patterning on a 5 × 5 cm2 glass substrate. For the validation of the proposed design thermal study of the fabricated heater has also been done using a FLIR IR camera. A very good agreement between the thermal image of modeled and fabricated heater has been achieved. This demonstrates the suitability of the proposed heater for PCR reaction applications.| File | Dimensione | Formato | |
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