Microgrippers (MGs) are MEMS devices that can manipulate cells and microscopic objects. In this work an approach based on both experimental and a finite element analysis is proposed with the aim of evaluating the torque exerted by the micro-Actuator of a novel prototype of MG equipped with electrostatic rotary comb-drives and Conjugate Surface Flexure Hinges (CSFHs) when powered by a 0-20 V peak-Topeak supply voltage. The angular displacement of the micro-Actuator has been measured using an image analysis method implemented by the Authors from videos acquired by a camera on a trinocular optical microscope, while the hinge stiffness has been estimated using numerical simulations: The obtained results show that the comb-drive can apply a maximum torque of 1.4 0.2 nNm.
First results on torque estimation by FEA and experimental analysis in a novel CSFH-based microgripper / Bocchetta, G.; Fiori, G.; Filippi, F.; Ursi, P.; Sciuto, S. A.; Scorza, A.. - (2023), pp. 182-185. (Intervento presentato al convegno 26th IMEKO TC4 International Symposium and 24th International Workshop on ADC/DAC Modelling and Testing, IWADC 2023 tenutosi a ita).
First results on torque estimation by FEA and experimental analysis in a novel CSFH-based microgripper
Ursi P.;
2023
Abstract
Microgrippers (MGs) are MEMS devices that can manipulate cells and microscopic objects. In this work an approach based on both experimental and a finite element analysis is proposed with the aim of evaluating the torque exerted by the micro-Actuator of a novel prototype of MG equipped with electrostatic rotary comb-drives and Conjugate Surface Flexure Hinges (CSFHs) when powered by a 0-20 V peak-Topeak supply voltage. The angular displacement of the micro-Actuator has been measured using an image analysis method implemented by the Authors from videos acquired by a camera on a trinocular optical microscope, while the hinge stiffness has been estimated using numerical simulations: The obtained results show that the comb-drive can apply a maximum torque of 1.4 0.2 nNm.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
