In this work we report on the extensive characterization of amorphous silicon carbide (a-SiC) coatings prepared by physical deposition methods. Our investigation is performed within the perspective application of a-SiC as an optical material for high-precision optical experiments and, in particular, in gravitational wave interferometry. We compare the results obtained with two different sputtering systems [a standard radio frequency (rf) magnetron sputtering and an ion-beam sputtering] to grasp the impact of two different setups on the repeatability of the results. After a thorough characterization of structural, morphological, and compositional characteristics of the prepared samples, we focus on a detailed study of the optical and mechanical losses in those materials. Mechanical losses are further investigated from a microscopic point of view by comparing our experimental results with molecular dynamic simulations of the amorphous SiC structure: first we define a protocol to generate a numerical model of the amorphous film, capturing the main features of the real system; then we simulate its dynamical behavior upon deformation in order to obtain its mechanical response.

Measurement and Simulation of Mechanical and Optical Properties of Sputtered Amorphous SiC Coatings / Favaro, G.; Bazzan, M.; Amato, A.; Arciprete, F.; Cesarini, E.; Corso, A. J.; De Matteis, F.; Dao, T. H.; Granata, M.; Honrado-Benitez, C.; Gutierrez-Luna, N.; Larruquert, J. I.; Lorenzin, G.; Lumaca, D.; Maggioni, G.; Magnozzi, M.; Pelizzo, M. G.; Placidi, E.; Prosposito, P.; Puosi, F.. - In: PHYSICAL REVIEW APPLIED. - ISSN 2331-7019. - 18:4(2022). [10.1103/PhysRevApplied.18.044030]

Measurement and Simulation of Mechanical and Optical Properties of Sputtered Amorphous SiC Coatings

Placidi E.
Writing – Original Draft Preparation
;
2022

Abstract

In this work we report on the extensive characterization of amorphous silicon carbide (a-SiC) coatings prepared by physical deposition methods. Our investigation is performed within the perspective application of a-SiC as an optical material for high-precision optical experiments and, in particular, in gravitational wave interferometry. We compare the results obtained with two different sputtering systems [a standard radio frequency (rf) magnetron sputtering and an ion-beam sputtering] to grasp the impact of two different setups on the repeatability of the results. After a thorough characterization of structural, morphological, and compositional characteristics of the prepared samples, we focus on a detailed study of the optical and mechanical losses in those materials. Mechanical losses are further investigated from a microscopic point of view by comparing our experimental results with molecular dynamic simulations of the amorphous SiC structure: first we define a protocol to generate a numerical model of the amorphous film, capturing the main features of the real system; then we simulate its dynamical behavior upon deformation in order to obtain its mechanical response.
2022
Amorphous films; Amorphous silicon; Coatings; Gravity waves; Ion beams; Magnetron sputtering; Optical properties Engineering uncontrolled terms Deposition methods; Gravitational-waves; High-precision; Measurement and simulation; Mechanical loss; Optical experiments; SiC coatings; Silicon carbide coatings; Sputtering systems; Wave interferometry
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Measurement and Simulation of Mechanical and Optical Properties of Sputtered Amorphous SiC Coatings / Favaro, G.; Bazzan, M.; Amato, A.; Arciprete, F.; Cesarini, E.; Corso, A. J.; De Matteis, F.; Dao, T. H.; Granata, M.; Honrado-Benitez, C.; Gutierrez-Luna, N.; Larruquert, J. I.; Lorenzin, G.; Lumaca, D.; Maggioni, G.; Magnozzi, M.; Pelizzo, M. G.; Placidi, E.; Prosposito, P.; Puosi, F.. - In: PHYSICAL REVIEW APPLIED. - ISSN 2331-7019. - 18:4(2022). [10.1103/PhysRevApplied.18.044030]
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11573/1659769
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