This work reports on the development of a large-area thin film heater for lab-on chip applications. The device is a chromium/aluminum/chromium stacked structure with a spiral shape fabricated on a 5× 5cm2 glass substrate through microelectronic technologies. Its geometry has been designed and optimized by COMSOL Multiphysics in terms of pitch and line width to achieve a uniform temperature distribution. Measurements performed with a thermo-camera show temperature variation below 1.5°C over 5cm2 area in excellent agreement with numerical modeling. To our knowledge, this is the largest area with such temperature uniformity achieved with a single heater in lab-on-chip systems. This opens the route for large-area thermal treatments as multiple-well DNA amplification or cell culture.
Large-area thin film heater for thermal treatments in lab-on-chip / Lovecchio, N.; De Cesare, G.; Nascetti, A.; Costantini, F.; Caputo, D.. - (2021), pp. 639-642. (Intervento presentato al convegno 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 tenutosi a Virtual conference) [10.1109/Transducers50396.2021.9495491].
Large-area thin film heater for thermal treatments in lab-on-chip
Lovecchio N.;De Cesare G.;Nascetti A.;Costantini F.;Caputo D.
2021
Abstract
This work reports on the development of a large-area thin film heater for lab-on chip applications. The device is a chromium/aluminum/chromium stacked structure with a spiral shape fabricated on a 5× 5cm2 glass substrate through microelectronic technologies. Its geometry has been designed and optimized by COMSOL Multiphysics in terms of pitch and line width to achieve a uniform temperature distribution. Measurements performed with a thermo-camera show temperature variation below 1.5°C over 5cm2 area in excellent agreement with numerical modeling. To our knowledge, this is the largest area with such temperature uniformity achieved with a single heater in lab-on-chip systems. This opens the route for large-area thermal treatments as multiple-well DNA amplification or cell culture.File | Dimensione | Formato | |
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