A new NEMS based linear-to-rotary displacement-capacity transducer

This paper presents a new NEMS-Technology based device, which transduces micro-metric linear displacements of a tip probe into capacity variations of a rotary comb-drive. The mechanical structure of this device is obtained through three basic steps. Firstly, the pseudo-rigid body equivalent mechanism (PRBM) is obtained by optimizing a straight-line path generator (D-gauge mechanism). Then, the PRBM is transformed into a compliant structure by replacing revolute joints with flexure hinges and by adding a differential comb-drive sensible to variation capacity. Finally, the geometry is transferred to the device by means of a process based on electron beam lithography.