This paper presents a new NEMS-Technology based device, which transduces micro-metric linear displacements of a tip probe into capacity variations of a rotary comb-drive. The mechanical structure of this device is obtained through three basic steps. Firstly, the pseudo-rigid body equivalent mechanism (PRBM) is obtained by optimizing a straight-line path generator (D-gauge mechanism). Then, the PRBM is transformed into a compliant structure by replacing revolute joints with flexure hinges and by adding a differential comb-drive sensible to variation capacity. Finally, the geometry is transferred to the device by means of a process based on electron beam lithography.

A new NEMS based linear-to-rotary displacement-capacity transducer / Buzzin, A.; Veroli, A.; De Cesare, G.; Giovine, E.; Verotti, M.; Belfiore, N. P.. - (2019), pp. 201-204. ((Intervento presentato al convegno 8th International Workshop on Advances in Sensors and Interfaces, IWASI 2019 tenutosi a Otranto (LE) - Italy [10.1109/IWASI.2019.8791387].

A new NEMS based linear-to-rotary displacement-capacity transducer

Buzzin A.;Veroli A.;De Cesare G.;Belfiore N. P.
2019

Abstract

This paper presents a new NEMS-Technology based device, which transduces micro-metric linear displacements of a tip probe into capacity variations of a rotary comb-drive. The mechanical structure of this device is obtained through three basic steps. Firstly, the pseudo-rigid body equivalent mechanism (PRBM) is obtained by optimizing a straight-line path generator (D-gauge mechanism). Then, the PRBM is transformed into a compliant structure by replacing revolute joints with flexure hinges and by adding a differential comb-drive sensible to variation capacity. Finally, the geometry is transferred to the device by means of a process based on electron beam lithography.
8th International Workshop on Advances in Sensors and Interfaces, IWASI 2019
comb-drives; EBL; linear displacements; NEMS
04 Pubblicazione in atti di convegno::04b Atto di convegno in volume
A new NEMS based linear-to-rotary displacement-capacity transducer / Buzzin, A.; Veroli, A.; De Cesare, G.; Giovine, E.; Verotti, M.; Belfiore, N. P.. - (2019), pp. 201-204. ((Intervento presentato al convegno 8th International Workshop on Advances in Sensors and Interfaces, IWASI 2019 tenutosi a Otranto (LE) - Italy [10.1109/IWASI.2019.8791387].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11573/1317516
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