Silicon nanowires as biocompatibile electronics-biology interface

Silicon nanowires (SiNWs) represent new opportunities for developing electrical biosensors due to their inherent properties, including large surface-to- volume ratio, rapid signal response and nanoscale footprint comparable to biomolecular and subcellular structures. Still, fabrication of nanosized electrodes is time-consuming, pricey and might be only scarcely compatible with the Complementary-Metal-Oxide- Semiconductor integrated circuits (CMOS-IC) technology. To take a step forward, we introduced an innovative approach to fabricate small, high-density SiNWs with a low-temperature (..)