Iron doped LiCoPO 4 thin films for lithium-ion microbatteries obtained by ns pulsed laser deposition

Well crystallized and homogeneous iron doped LiCoPO 4 (LCfP) thin films have been grown by ns Pulsed Laser Ablation, at ambient temperature without any substrate heating or post-annealing treatments. The films have been deposited in vacuum and in the presence of buffer gases (O 2 , Ar) and it has been found that their crystallinity, structure and morphology depend on pressure conditions. The films have been studied by Scanning Electron Microscopy and X Ray Diffraction, while their first steps of growth have been characterized by Transmission Electron Microscopy. A study of the plasma produced by the laser ablation in the different pressure conditions has been carried out with the aim of elucidate the mechanisms involved in the films deposition. LCfP thin films have been also tested as microelectrodes in lithium cells in galvanostatic condition for analyzing the reversibility of the lithium-ion battery. © 2018 Elsevier B.V.