Indium Tin Oxide (ITO) is widely used in solar cell devices for its excellent electrical and optical characteristics, such as high transparency in the Ultraviolet-Visible range and good conductivity (around 104W-1cm-1). In this work we have compared thin (70-150 nm) ITO layers deposited by Direct Current or Radio Frequency sputtering. We have used different substrate temperatures during film growthand have afterwards thermally annealed the samples at different temperatures up to 300 °C to investigate the effects on the electrical and optical properties of the material. We have found out that the different growth/annealing conditions induce changes in the optical properties of the samples as well as in the conductivity and carrier concentration.
Temperature effects on sputtered ITO / Menchini, F.; Serenelli, L.; Stracci, G.; Izzi, M.; Salza, E.; Caputo, D.; De Cesare, G.; Tucci, M.. - (2018), pp. 3128-3132. (Intervento presentato al convegno 7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 tenutosi a WAIKOLOA, HAWAII) [10.1109/PVSC.2018.8547914].
Temperature effects on sputtered ITO
Menchini, F.;Serenelli, L.;Caputo, D.;De Cesare, G.;
2018
Abstract
Indium Tin Oxide (ITO) is widely used in solar cell devices for its excellent electrical and optical characteristics, such as high transparency in the Ultraviolet-Visible range and good conductivity (around 104W-1cm-1). In this work we have compared thin (70-150 nm) ITO layers deposited by Direct Current or Radio Frequency sputtering. We have used different substrate temperatures during film growthand have afterwards thermally annealed the samples at different temperatures up to 300 °C to investigate the effects on the electrical and optical properties of the material. We have found out that the different growth/annealing conditions induce changes in the optical properties of the samples as well as in the conductivity and carrier concentration.| File | Dimensione | Formato | |
|---|---|---|---|
|
Menchini_Temperature-effects_2018.pdf
solo gestori archivio
Tipologia:
Versione editoriale (versione pubblicata con il layout dell'editore)
Licenza:
Tutti i diritti riservati (All rights reserved)
Dimensione
119.69 kB
Formato
Adobe PDF
|
119.69 kB | Adobe PDF | Contatta l'autore |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
