The first successful attempt to integrate on-chip optical waveguides based on oxidized porous silicon and amorphous silicon photodetectors have been demonstrated. Buried channel waveguides were performed by thermal oxidation of porous silicon. Amorphous silicon photodetectors were fabricated on the waveguides. Different device structures as well as their performance attributes are exhibited. The devices were demonstrated to have photocurrent characteristics promising for optoelectronic applications.
Amorphous silicon photodectors for optical inegrated cicuits / Balucani, Marco; V., Bondarenko; G., Lamedica; A. RICCIARDELLI, A. FERRARI. - In: PROCEEDINGS - SPIE. - ISSN 1018-4732. - STAMPA. - 3405:(1998), pp. 784-789. [10.1117/12.312663]
Amorphous silicon photodectors for optical inegrated cicuits
BALUCANI, Marco;
1998
Abstract
The first successful attempt to integrate on-chip optical waveguides based on oxidized porous silicon and amorphous silicon photodetectors have been demonstrated. Buried channel waveguides were performed by thermal oxidation of porous silicon. Amorphous silicon photodetectors were fabricated on the waveguides. Different device structures as well as their performance attributes are exhibited. The devices were demonstrated to have photocurrent characteristics promising for optoelectronic applications.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
