In recent years, strained silicon is emerging as a key solution for integrated circuits, using biaxial tensile stress to enhance charge carrier mobility [1]. In the search for faster, non-destructive nano-characterisation techniques for strain monitoring in semiconductor manufacturing, tip-enhanced Raman spectroscopy (TERS) was presented as an ideal choice [2]. In this study also the innovative titanium nitride (TiN) AFM probe, which allows clean room implementation for in-line characterisation, was used. The results highlight TERS as a powerful tool for monitoring the quality of semiconductor production lines, with unprecedented resolution and speed. This research advances tip-enhanced Raman spectroscopy to Technology Readiness Level 6, highlighting its transformative impact on semiconductor manufacturing quality control. [1] P. Dobrosz et all, Surface and Coatings Technology, 2005, 200, 1755–1760. [2] N.Hayazawa et al., Nanosensing Materials Devices, and Systems III, 2007, 6769.

Strained silicon Technology: Non-destructive nanoscale characterization through Tip-Enhanced Raman Spectroscopy / Proietti, Anacleto; Mancini, Chiara; LA PENNA, Giancarlo; Atanasio, Pierfrancesco; Buccini, Luca; Passeri, Daniele; Rossi, Marco. - (2024). (Intervento presentato al convegno WORKSHOP SHARESCIENCE tenutosi a Rome, Italy).

Strained silicon Technology: Non-destructive nanoscale characterization through Tip-Enhanced Raman Spectroscopy

Anacleto Proietti
Primo
Investigation
;
Chiara Mancini
Investigation
;
Giancarlo La Penna
Investigation
;
Pierfrancesco Atanasio
Investigation
;
Luca Buccini
Investigation
;
Daniele Passeri
Supervision
;
Marco Rossi
Ultimo
Supervision
2024

Abstract

In recent years, strained silicon is emerging as a key solution for integrated circuits, using biaxial tensile stress to enhance charge carrier mobility [1]. In the search for faster, non-destructive nano-characterisation techniques for strain monitoring in semiconductor manufacturing, tip-enhanced Raman spectroscopy (TERS) was presented as an ideal choice [2]. In this study also the innovative titanium nitride (TiN) AFM probe, which allows clean room implementation for in-line characterisation, was used. The results highlight TERS as a powerful tool for monitoring the quality of semiconductor production lines, with unprecedented resolution and speed. This research advances tip-enhanced Raman spectroscopy to Technology Readiness Level 6, highlighting its transformative impact on semiconductor manufacturing quality control. [1] P. Dobrosz et all, Surface and Coatings Technology, 2005, 200, 1755–1760. [2] N.Hayazawa et al., Nanosensing Materials Devices, and Systems III, 2007, 6769.
2024
File allegati a questo prodotto
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11573/1701831
 Attenzione

Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo

Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact