We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration. (c) 2005 Optical Society of America.
Photonic devices based on preferential etching / Bellini, Bob; Larchanché, Jean-François; Vilcot, Jean-Pierre; Decoster, Didier; Beccherelli, Romeo; D’Alessandro, Antonio. - In: APPLIED OPTICS. - ISSN 1559-128X. - 44:33(2005), pp. 7181-7186. [10.1364/ao.44.007181]
Photonic devices based on preferential etching
d’Alessandro, Antonio
2005
Abstract
We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration. (c) 2005 Optical Society of America.| File | Dimensione | Formato | |
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