Integrated optical waveguides based on oxidized porous silicon were fabricated by means of traditional silicon technology. Near-field pattern and out-of-plane scattering losses were measured to characterize optical properties of the waveguides. Strong confinement of light within the core of the waveguides as well as optical losses of about 5 dB/cm have been demonstrated in the visible range. The achieved results make the waveguides promising in optoelectronics use.

Characterization of integrated optical waveguides based on oxidized porous silicon / Balucani, Marco; V., Bondarenko; N., Kasuchits; G., Lamedica; N., Vorozov; A., Ferrari. - In: PROCEEDINGS - SPIE. - ISSN 1018-4732. - 3405:(1998), pp. 762-767. [10.1117/12.312660]

Characterization of integrated optical waveguides based on oxidized porous silicon

BALUCANI, Marco;
1998

Abstract

Integrated optical waveguides based on oxidized porous silicon were fabricated by means of traditional silicon technology. Near-field pattern and out-of-plane scattering losses were measured to characterize optical properties of the waveguides. Strong confinement of light within the core of the waveguides as well as optical losses of about 5 dB/cm have been demonstrated in the visible range. The achieved results make the waveguides promising in optoelectronics use.
1998
01 Pubblicazione su rivista::01a Articolo in rivista
Characterization of integrated optical waveguides based on oxidized porous silicon / Balucani, Marco; V., Bondarenko; N., Kasuchits; G., Lamedica; N., Vorozov; A., Ferrari. - In: PROCEEDINGS - SPIE. - ISSN 1018-4732. - 3405:(1998), pp. 762-767. [10.1117/12.312660]
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11573/256412
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