Integrated optical waveguides based on oxidized porous silicon were fabricated by means of traditional silicon technology. Near-field pattern and out-of-plane scattering losses were measured to characterize optical properties of the waveguides. Strong confinement of light within the core of the waveguides as well as optical losses of about 5 dB/cm have been demonstrated in the visible range. The achieved results make the waveguides promising in optoelectronics use.
Characterization of integrated optical waveguides based on oxidized porous silicon / Balucani, Marco; V., Bondarenko; N., Kasuchits; G., Lamedica; N., Vorozov; A., Ferrari. - In: PROCEEDINGS - SPIE. - ISSN 1018-4732. - 3405:(1998), pp. 762-767. [10.1117/12.312660]
Characterization of integrated optical waveguides based on oxidized porous silicon
BALUCANI, Marco;
1998
Abstract
Integrated optical waveguides based on oxidized porous silicon were fabricated by means of traditional silicon technology. Near-field pattern and out-of-plane scattering losses were measured to characterize optical properties of the waveguides. Strong confinement of light within the core of the waveguides as well as optical losses of about 5 dB/cm have been demonstrated in the visible range. The achieved results make the waveguides promising in optoelectronics use.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.