This paper is a review of application of porous silicon to Sol technology. Three main approaches for fabricating the Sol structures based on PS are critically reviewed. We show that there exists renewed interest in all these approaches although Sol technology based on layer transfer with PS as the splitting layer is the dominated method. Patent analysis is presented to reveal new potentialities of porous silicon-based Sol technologies.
Porous Silicon Based SOI: History and Prospects / Balucani, Marco; Bondarenko, V; Troyanova, G; Ferrari, A.. - STAMPA. - 185(2005), pp. 53-64.
Porous Silicon Based SOI: History and Prospects
BALUCANI, Marco;
2005
Abstract
This paper is a review of application of porous silicon to Sol technology. Three main approaches for fabricating the Sol structures based on PS are critically reviewed. We show that there exists renewed interest in all these approaches although Sol technology based on layer transfer with PS as the splitting layer is the dominated method. Patent analysis is presented to reveal new potentialities of porous silicon-based Sol technologies.File allegati a questo prodotto
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.